To address the future semi-conductor industry needs for 5G applications, it is becoming urgent to improve the contact repeatability and traceability for on-wafer measurements of agile micro and nano-devices.

In the Nano 2022 project, we are developing an automated probe station based on piezo-electrical nano-positionning stages. The Ground Signal Ground industrial probes and chuck are both mounted on closed-loop piezo-base nano-positioners. The aim is to reach nm positioning accuracy and thus increasing the repeatability of the measurements. The positioners are fully automated and controlled under LabVIEW® software. Real time image processing of probe landing into the DUT is under development to perform accurate, precise and repeatable alignment and tilt correction of the GSG probes, under MATLAB® software. Uncertainty measurements and calibrations will be done with VNA Tools II®.

The project is supported by the Nano 2022 Plan in the frame of the common lab IEMN / STMicroelectronics and by the European Metrology Programme for Innovation and Research (EMPIR) Project 18SIB09 Traceability for electrical measurements at millimetre-wave and terahertz frequencies for communications and electronics technologies. The EMPIR Programme is co-financed by the Participating States and from the European Union’s Horizon 2020 Research and Innovation Programme.